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- China Manufacturer with main products:Manufacturing line for amorphous silicon PV solar cells ,Sputtering coating line for Low-E or ITO glass ,Manufacturing line for CIGS solar cell ,Smart sputtering-optical coater of auto loading ,Cathodic Arc PVD coater for hard film deposition ,Sputtering web coater ,Continuous production line for VIP sealing ,Vacuum Sealing Machine for VIP ,Wire-feeding web coater ,Anti-fingerprint vacuum coater ,Thermal evaporation coater ,E-beam optical coater
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Ion-beam sputtering http://www.pvd-metallizer.com
Ion-beam sputtering (IBS) is a method in which the target is external to the ion source. A source can work without any magnetic field like in a hot filament ionization gauge. In a Kaufman source ions are generated by collisions with electrons that are confined by a magnetic field as in a magnetron. They are then accelerated by the electric field emanating from a grid toward a target. As the ions leave the source they are neutralized by electrons from a second external filament. IBS has an advantage in that the energy and flux of ions can be controlled independently. Since the flux that strikes the target is composed of neutral atoms, either insulating or conducting targets can be sputtered.
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